Work

A review on hot cathode ionisation gauges with focus on a suitable design for measurement accuracy and stability

Year: 2020

Type: article

Abstract: A literature review starting from 1950 is given on the design and geometry of ionisation gauge types with hot cathodes. Considerations on the material of the electrodes and of surface effects are included. The review focuses on the design issues for measurement accuracy, linearity, repeatability, reproducibility, and stability of sensitivity. Also, the attempts to reduce the lower measurement limit are reviewed to some extent.

Source: Vacuum

DOI: 10.1016/j.vacuum.2020.109545

Authors: Karl Jousten, Frederic Boineau, Nenad Bundaleski, Claus Illgen, Janez Setina, Orlando M.N.D. Teodoro, Martin Vicar, Martin Wüest

Institutions: Physikalisch-Technische Bundesanstalt, Laboratoire National de Métrologie et d'Essais, Universidade Nova de Lisboa, Institute of Metals and Technology, Český metrologický institut

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $2,200

Funders: European Association of National Metrology Institutes, European Commission, Horizon 2020, European Metrology Programme for Innovation and Research

Awards: G2655053769, G434337789

OpenAlex ID: W3035704902

FWCI: 1.563

Cites: 136

Cited by: 34

Related to: 10