Work

Characterization and fabrication of nano- and micron-sized structures on the Si surface using scanning probe microscopies

Year: 1997

Type: article

Source: PhDT

Author: Elain Fu

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3036900369

FWCI:

Cites:

Cited by:

Related to: 10