Year: 2020
Type: article
Abstract: Actuation of thin polymeric films via electron irradiation is a promising avenue to realize devices based on strain engineered two-dimensional materials. Complex strain profiles demand a deep understanding of the mechanics of the polymeric layer under electron irradiation; in this article, we report a detailed investigation on electron-induced stress on a poly-methyl-methacrylate (PMMA) thin film material. After an assessment of stress values using a method based on dielectric cantilevers, we directly investigate the lateral shrinkage of PMMA patterns on epitaxial graphene, which reveals a universal behavior, independent of the electron acceleration energy. By knowing the stress–strain curve, we finally estimate an effective Young’s modulus of PMMA on top of graphene, which is a relevant parameter for PMMA-based electron-beam lithography and strain engineering applications.
Source: Journal of Applied Physics
DOI: 10.1063/5.0021812
Authors: Davide Giambastiani, Fabio Dispinzeri, Francesco Colangelo, Stiven Forti, Camilla Coletti, Alessandro Tredicucci, Alessandro Pitanti, Stefano Roddaro
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
Funder: Horizon 2020 Framework Programme
Award: G6196935697
OpenAlex ID: W3040330883