Year: 2020
Type: article
Abstract: We have successfully developed a mass productive sputtering module for insulating materials and advanced PbZrTiO3 (PZT) process technology. PZT films were deposited on 8 inch substrate using mass productive sputtering tool (SME-200 ULVAC inc.). The results obtained in this study are as follows ; (1) As a result that a stable anode was installed, stability of Pb content and deposition rate within film in continuous sputtering (2) Low temperature crystallization of PZT film (＜500℃) by using buffer layer between PZT and bottom Pt electrode (3) High piezoelectric coefficient e31 of －15.5 C/m2 and breakdown voltage of 200 V.
Source: Vacuum and Surface Science
DOI: 10.1380/vss.63.364
Institution: Ulvac (Japan)
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W3040950136