Work

Advanced Quality Control (AQC) of Silicon Wafer Specifications for Yield Enhancement for Smart Manufacturing

Year: 2020

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/tsm.2020.3010200

Authors: Chen-Fu Chien, Yin-Hung Chen, Mei-Fang Lo

Institutions: National Tsing Hua University, National Science and Technology Council

Language: English

Topic: Advanced Statistical Process Monitoring

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funders: Micron Foundation, Ministry of Science and Technology, Taiwan

Awards: Industry 3.5 Total Solutions of Intelligent Manufacturing and Big Data Analytics( III ), Artificial intelligence innovation research center on intelligent manufacturing(3/5), Industry 3.5 Total Solutions of Intelligent Manufacturing and Big Data Analytics( II )

OpenAlex ID: W3043292012

FWCI: 2.897

Cites: 45

Cited by: 35

Related to: 10