Work

High-G and High-Bandwidth Bulk Acoustic Wave (BAW) Accelerometers Using a Metal-Less AlN-HARPSS Process With 95 nm Gaps

Year: 2020

Type: article

Source: IEEE Sensors Letters

DOI: 10.1109/lsens.2020.3011642

Authors: Anosh Daruwalla, Haoran Wen, Minxiang Gong, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W3044018538

FWCI: 0.708

Cites: 20

Cited by: 15

Related to: 10