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スパッタの理論 I 非晶質のスパッタ収量と多結晶ターゲット

Year: 1969

Type: article

Source: Physical review. D/Physical review. D.

Author: Peter Sigmund

Language: Japanese

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3046333974

FWCI: 5.335

Cites:

Cited by: 1,969

Related to: 10