Work

FIB-Based Fatigue Testing of Silicon Nitride Thin Films for Space Applications

Year: 2005

Type: article

Authors: Wen-Hsien Chuang, Rainer K. Fettig, Reza Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3049332229

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Related to: 20