Work

Temperature Compensation of Thermally Actuated, In-Plane Resonant Gas Sensor Using Embedded Oxide-Filled Trenches

Year: 2020

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2020.3014502

Authors: Steven A. Schwartz, Oliver Brand, Luke A. Beardslee

Institutions: Georgia Institute of Technology, Emory University, Naval Submarine Medical Research Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3049731079

FWCI: 0.344

Cites: 17

Cited by: 10

Related to: 10