Work

MEMS/MOEMS Components and Their Applications IV

Year: 2007

Type: book-chapter

Source: SPIE eBooks

Authors: Srinivas Tadigadapa, Reza Ghodssi, Albert K. Henning

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3080122592

FWCI:

Cites:

Cited by: 2

Related to: 20