Work

ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review

Year: 2020
Type: article
Abstract: Surface acoustic wave (SAW) gas sensors are of continuous development interest to researchers due to their sensitivity, short detection time, and reliability. Among the most used materials to achieve the sensitive film of SAW sensors are metal oxide semiconductors, which are highlighted by thermal and chemical stability, by the presence on their surface of free electrons and also by the possibility of being used in different morphologies. For different types of gases, certain metal oxide semiconductors are used, and ZnO is an important representative for this category of materials in the field of sensors. Having a great potential for the development of SAW sensors, the discussion related to the development of the sensitivity of metal oxide semiconductors, especially ZnO, by the synthesis method or by obtaining new materials, is suitable and necessary to have an overview of the latest results in this domain.
Source: Sensors
Language: English
Open Access status: gold
Estimated APC paid: $2,112
OpenAlex ID: W3083858987
FWCI: 2.881
Cites: 166
Cited by: 76
Related to: 10