Work

Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators

Year: 2020

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2020.3022765

Authors: Jeremy Yang, Benoit Hamelin, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Defense Advanced Research Projects Agency

Awards: G5245224541, NNCI: Southeastern Nanotechnology Infrastructure Corridor (SENIC)

OpenAlex ID: W3089077683

FWCI: 0.787

Cites: 56

Cited by: 22

Related to: 10