Machine learning–driven in situ process monitoring with vibration frequency spectra for chemical mechanical planarization
Year: 2020
Type: article
Authors: Jia Liu, Jingyi Zheng, Prahalada Rao, Zhenyu Kong
Institutions: Auburn University, University of Nebraska–Lincoln, Virginia Tech
Language: English
Subfield: Statistics, Probability and Uncertainty
Field: Decision Sciences
Domain: Social Sciences
Open Access status: closed
OpenAlex ID: W3094510232