Work

MOEMS and Miniaturized Systems VI

Year: 2007

Type: book-chapter

Source: SPIE eBooks

Authors: David L. Dickensheets, Bishnu P. Gogoi, Harald Schenk

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3095361597

FWCI: 0.917

Cites: 3

Cited by: 11

Related to: 10