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An ultrathin integrated nanoelectromechanical transducer based on hafnium zirconium oxide

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Year: 2019
Type: article
Source: Nature Electronics
DOI: 10.1038/s41928-019-0305-3
Authors: Mayur Ghatge, Glen Walters, Toshikazu Nishida, Roozbeh Tabrizian
Institution: University of Florida
Language: English

Topic: Acoustic Wave Resonator Technologies
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: green

Funder: National Science Foundation
Awards: CAREER:Active Nano-Acoustic Waveguide Matrix to Tackle Signal Processing Limits: Enabling Wideband and Nonreciprocal Integrated Communication Beyond the UHF, Ferroelectric HfO2 on Germanium Tunnel Junctions Towards Sub-Femto Joule Switching
OpenAlex ID: W3104313155
FWCI: 2.49
Cites: 41
Cited by: 58
Related to: 10
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