Work

Innovative Nondestructive Compositional Mapping of Trace-Elements and Contaminants at Micron-Scale in Wafers and Packaging

Year: 2016

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2016p0485

Authors: S.H. Lau, Wenbing Yun, Sylvia JY Lewis, Benjamin Stripe, Janos Kirz, Alan Lyon, David Reynolds, Sharon Chen, Vladimir Semenov, Ian Spink

Institution: Sigray (United States)

Language: English

Topic: X-ray Spectroscopy and Fluorescence Analysis

Subfield: Radiation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3117320199

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