Year: 2006
Type: conference-paper
Abstract: An undergraduate-level course that provided an introduction to the fields of MEMS, with an emphasis on the processes used to microfabricate MEMS, was first developed at UCLA in 1998.It has served well to quickly ramp-up new MEMS graduate students that have lacked prior experience with MEMS.It has also given undergraduates and students even outside of the school of engineering, an opportunity to be exposed to micromachining and MEMS.A comprehensive, weekly, and hands-on laboratory session gave all students a greater appreciation for the capabilities and limitations of micromachining processes and MEMS devices.Due to excessive popularity and safety limitations on the number of students allowed into each lab session, the course was split into two separate courses: a lecture-only course and a laboratory course.Now students from nearly any background can learn about MEMS and could be the seeds of future uses of MEMS technology in their chosen discipline.These courses also serve as a spring board into the formal MEMS graduate program at UCLA, as well as into the MEMS industry.
Authors: J.W. Judy, P.S. Motta
Language: English
Subfield: Architecture
Field: Engineering
Domain: Physical Sciences
SDG: Quality education
Open Access status: gold
Funder: National Science Foundation
OpenAlex ID: W3118254282