Year: 1996
Type: conference-paper
Abstract: Surface-micromachined, batch-fabricated structures that combine plated-nickel films with polysilicon mechanical fl exures to produce individually addressable, magnetically activated devices have been fabricated and tested.Individual microactuator control has been achieved two ways: (1) by actuating devices using the magnetic fi eld generated by coils integrated around each device, (2) by using electrostatic forces to clamp selected devices to an insu lated ground plane while undamped devices are freely moved through large out-of-plane excursions by an off-chip magnetic fi eld.The present application for these structures is as micromirrors for microphotonic systems where they can be used either for selection from an array of mirrors or else individually for switching among fiber paths.
Authors: J.W. Judy, R.S. Muller
Institution: University of California, Berkeley
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W3119161623