Year: 1996
Type: conference-paper
Abstract: The design of electrostatic actuators optimized for both high force generation as well as long and stable displacement is difficult.Several groups have proposed and/or implemented devices based on "zipping" to achieve improvements in both areas simultaneously.In these designs the implementation of a zipping actuator requires the fabrication of a curved surface on which one electrode touches another.The fabrication of controlled curved surfaces often presents difficulties, especially those perpendicular to the wafer surface.In this paper we propose and model a class of devices, two-phase actuators, which can obtain similar effects without need for fabrication of curved structures.
Authors: J.R. Gilbert, S.D. Senturia
Institution: Massachusetts Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W3119304128