Work

A Remotely Adjustable Micromachined Check-valve With a Variable Length Cantilever-beam Structure for Implantable Biomedical Microsystems

Year: 2004

Type: conference-paper

Abstract: In this paper, we present a remotely adjustable micromachined check-valve with a variable length cantilever-beam structure for implantable biomedical microsystems.The adjustable cantilever-beam structure is fabricated by gold thermo-compression bond of a thin silicon wafer over a glass substrate.The evaporated gold forms anchors on the silicon and strips on the glass substrate.Electrochemical dissolution of gold anchors and strips by a constant DC current (obtained via a telemetry link) is used to adjust the microfluidic characteristics of the valve (opening pressure and flow rate).The anchor pads are 10x10µm 2 in size with 10µm separation while strips are 50µm wide and 1.5mm long.A current density of 35mA/cm 2 resulted in the release of gold anchors in 2 minutes with gold strips completely removed in 10 minutes.

Source: Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)

DOI: 10.31438/trf.hh2004.73

Authors: T. Pan, B. Ziaie

Institutions: University of Minnesota, University of Minnesota System

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Funders: National Science Foundation, Mayo Clinic, University of Minnesota

Award: G6671297155