Work

Automated Optical Fiber Alignment in 2-axes Using 3d Shaped Actuators

Year: 2006

Type: conference-paper

Abstract: We report the development and characterization of an automated on-chip 2-axis optical fiber alignment system using 3D shaped actuators.Gray-scale technology was used to integrate sloped silicon wedges with electrostatic comb-drive actuators to deflect an optical fiber cantilever in-and out-of the plane of the wafer.Automated fiber alignment to Indium-phosphide (InP) waveguides with an accuracy of 1.6µm or better is demonstrated for the first time.The influences of alignment target location, actuation parameters, and alignment algorithms on total alignment time are also presented.

Source: Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)

DOI: 10.31438/trf.hh2006.17

Authors: B. Morgan, R. Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid