Work

A Novel Benzocyclobutene-based Device for Studying the Physics of the Ebullition Process

Year: 2006
Type: conference-paper
Abstract: We report, for the first time, simultaneous measurement of temperature and heat flux with a resolution of about 35 µm underneath/around a bubble.This was achieved by fabrication of a multilayer Silicon/Benzocyclobutene (BCB) structure with embedded temperature sensors.The sensors are radially distributed around a cavity, with energy input by a thin film heater microfabricated on the backside of the membrane structure.Single bubbles were generated from the cavity while the temperatures and the bubble images were recorded with a sampling frequency of 8 kHz.Analysis of the results revealed unique details of the nucleation dynamics and its associated heat transfer processes.
Language: English
Open Access status: hybrid
OpenAlex ID: W3120627644
FWCI:
Cites: 6
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Related to: 10