Work

A Thin Film Teflon Electret Technology for Microphone Applications

Year: 1996

Type: conference-paper

Abstract: A micromachining compatible Teflon electret technology has been developed.The electret material used is thin film spin-on Teflon.A pulsed electron gun, called the Back-Lighted Thyratron (BLT), is used for charge implantation.A charge compensation method is used to measure the charge density of the electret.The electret has a saturated charge density on the order of 10 4 C/m 2 • A prototype silicon micromachined electret microphone has been fabricated and tested.An open circuit sensitivity of 0.3 mV/Pa has been achieved for a hybrid microphone package.

Source: Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)

DOI: 10.31438/trf.hh1996.53

Authors: T.-Y. Hsu, W.H. Hsieh, K. Furutani, Y.-C. Tai

Institutions: California Institute of Technology, Toyota Technological Institute

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Funders: National Science Foundation, David and Lucile Packard Foundation

Award: PYI: An Integrated Tunneling Accelerometer