Work

Fabrication of a Micro Turbine/Bearing Rig

Year: 1998

Type: conference-paper

Abstract: This paper reports on an effort to build a 5-level wafer bonded micro-machined rotary machine.The device has been successfully fabricated through the use of aligned bonding, deep silicon etching, and laser-assisted etching of silicon.The preliminary spin testing of the micro turbine has demonstrated continuous operation at 30000rpm.

Source: Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)

DOI: 10.31438/trf.hh1998a.13

Authors: C-C. Lin, R. Ghodssi, A.A. Ayón, D.-Z. Chen, M.A. Schmidt

Institution: Massachusetts Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Funder: Army Research Office

OpenAlex ID: W3121048016

FWCI: 3.849

Cites: 5

Cited by: 5

Related to: 10