Year: 2006
Type: conference-paper
Abstract: We present the first of a series of microfabricated sensors for directly measuring fundamental plasma parameters with unprecedented resolution in typical laboratory plasmas.Microfabricated probes hold the promise of significantly advancing basic plasma physics by enabling the measurement of some fundamental plasma processes under controlled conditions at the relatively high plasma densities typically of interest.Our first probes are arrays of micrometer-scale electric-field sensors for directly measuring fluctuating electric fields in the Large Plasma Device (LAPD) at UCLA.They are made of polyimide, chrome, and gold, have tip widths ranging from 8 m to 20 m, are 22 m thick, and spaced 40 m apart.The fabricated tips are wirebonded to a preamplifier PCB with commercial amplifiers, and everything is inserted inside a plasma chamber.The frequency response of the detectors extends to 1 GHz.
Authors: J.A. Stillman, F.C. Chiang, P.A. Pribyl, M. Nakamoto, W.N. Gekelman, J.W. Judy
Institution: University of California, Los Angeles
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W3121079603