Year: 2006
Type: conference-paper
Abstract: Micromirrors used to steer optical beams at the tip of an endoscope are an active area of research.MEMS mirrors with various actuation mechanisms have been reported including rotating micromotors [1], parallel plate electrostatic [2], electrothermal [3,4] and vertical electrostatic combs[5-8]. This paper presents for the first time a two-axis magnetically actuated micromirror designed for an OCT (Optical Coherence Tomography) endoscope.We demonstrate also for the first time a free-rotating axis with no spring constraint, combined with an orthogonal resonant drive axis.Magnetic actuation allows large angular deflections (+/-40 degrees rotation) at low voltage (<1V), a significant advantage relative to electrostatic mirrors for patient safety.Actuation is accomplished with 4 coils (two pairs) in proximity to the moving mirror, which contains a small permanent magnet.The entire endoscope scan engine is contained in a 2.8 mm ID plastic tube.Details of the endoscope design, MEMS fabrication, optical path, scanning, and sample OCT images are presented.
Institutions: Draper Laboratory, Massachusetts General Hospital
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W3121103370