Work

CMOS-MEMS: Advanced Micro and Nanosystems, Volume 2

Year: 2005

Type: article

Authors: Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3126699975

FWCI:

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Cited by: 1

Related to: 10