Year: 2021
Type: preprint
Abstract: In a comprehensive study on several samples we demonstrate for our laboratory-based computed tomography system resolutions down to 150nm. The achieved resolution is validated by imaging com-mon test structures in 2D and Fourier Shell Correlation of 3D volumes. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits, ageing in lithium battery electrodes, and volumetric of metallic sub-micrometer fillers of com-posites. Thus, our laboratory system provides the unique possibility to image non-destructively struc-tures in the range of hundred nanometers, even for high density materials.
Source: arXiv (Cornell University)
Authors: Müller, Dominik, Graetz, Jonas, Balles, Andreas, Stier, Simon, Hanke, Randolf, Fella, Christian
Institution: University of Würzburg
Language: English
Subfield: Radiation
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W3132817974