Work

Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry

Year: 2021

Type: erratum

Abstract: An amendment to this paper has been published and can be accessed via a link at the top of the paper.

Source: Scientific Reports

DOI: 10.1038/s41598-021-86624-1

Authors: Ufuk Kilic, Alyssa Mock, Derek Sekora, Simeon Gilbert, Shah Valloppilly, Giselle Melendez, Natale Ianno, Marjorie Langell, Eva Schubert, Mathias Schubert

Institutions: University of Nebraska–Lincoln, Polytechnic University of Puerto Rico, Linköping University, Leibniz Institute of Polymer Research

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $1,990

OpenAlex ID: W3136489741

Cites:

Cited by:

Related to: 10