Work

A Study of Mode-Matching and Alignment In Piezoelectric Disk Resonator Gyros Via Femtosecond Laser Ablation

Year: 2021

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/mems51782.2021.9375162

Authors: Zhenming Liu, Anosh Daruwalla, Benoit Hamelin, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W3139384161

FWCI: 8.05

Cites: 12

Cited by: 22

Related to: 10