Highly manufacturable 0.18 um generation LOGIC technology
Year: 1999
Type: article
Authors: Shuji Ikeda, Yoshinori Yoshida, K. Shoji, Kenichi Kuroda, Kazuhiro Komori, Norio Suzuki, Kikuo Okuyama, Shiro Kamohara, Norio Ishitsuka, H. Miura, Eiichi Murakami, Toshiaki Yamanaka
Institution: Hitachi (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3158187437