Work

Composition Segregation of Ge-Rich GST and Its Effect on Reliability

Year: 2021

Type: conference-paper

Source: IEEE International Reliability Physics Symposium proceedings

DOI: 10.1109/irps46558.2021.9405168

Authors: Yung-Huei Lee, P.J. Liao, Vincent Hou, Dawei Heh, Chih-Hung Nien, Wen-Hsien Kuo, Gary T. Chen, Shao-Ming Yu, Yu-Sheng Chen, Jau-Yi Wu, Xinyu Bao, Carlos H. Diaz

Institution: Taiwan Semiconductor Manufacturing Company (Taiwan)

Language: English

Topic: Phase-change materials and chalcogenides

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Taiwan Semiconductor Manufacturing Company

OpenAlex ID: W3162062909

FWCI: 11.9

Cites: 16

Cited by: 16

Related to: 10