Work

Monocrystalline 4H Silicon Carbide-on-Insulator Substrates for Nav-Grade Planar BAW Gyroscopes

Year: 2021

Type: conference-paper

Source: IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

DOI: 10.1109/inertial51137.2021.9430480

Authors: Benoit Hamelin, Jeremy Yang, Zhenming Liu, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

Award: G1381518900

OpenAlex ID: W3165167694

FWCI: 4.317

Cites: 23

Cited by: 11

Related to: 10