Work

A temperature compensated biaxial eFM accelerometer in Epi-seal process

Year: 2021

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2021.112860

Authors: Seungyong Shin, Hyun-Keun Kwon, Gabrielle D. Vukasin, Thomas W. Kenny, Farrokh Ayazi

Institutions: Georgia Institute of Technology, Stanford University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funders: National Science Foundation, National Sleep Foundation, Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung, Defense Advanced Research Projects Agency

Awards: Renewal Proposal for the National Nanofabrication Users Network, G6107034972, G839326497

OpenAlex ID: W3168655071

FWCI: 0.736

Cites: 52

Cited by: 19

Related to: 10