Microfabrication and characterization of dual-frequency piezoelectric micromachined ultrasonic transducers
Year: 2021
Type: conference-paper
Authors: Lixiang Wu, Mohssen Moridi, Gaofeng Wang, Qifa Zhou
Institutions: Silicon Austria Labs (Austria), Hangzhou Dianzi University
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3179318984