Research on chemical kinetics and calculation of energy deposition in KrF * excimer system pumped by proton-beam
Year: 1992
Type: article
Source: Jisuan wuli
Authors: Wang Xiaosha, Dongquan Chen, Zhengyan Wang
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3191244438
