Work

High Voltage Beam Discharge in Nitrogen With Fast Neutral Atom Reflection From Tantalum Cathode

Year: 2021

Type: article

Abstract: The kinetic simulation of high-voltage beam discharge at low pressure of nitrogen is fulfilled. The characteristics of particle flows to the tantalum cathode and back reflection of fast nitrogen atoms are calculated. The reflection coefficient equals tens of percents at voltages up to 100 kV. The generation of fast nitrogen atoms may be used for metals and dielectrics nitriding with implantation effect.

DOI: 10.46813/2021-134-207

Authors: V.S. Boldasov, A.I. Kuzmichev, M.S. Melnichenko, V.M. Shulaev

Institutions: Moscow Polytechnic University, National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”

Language: English

Topic: Vacuum and Plasma Arcs

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: gold

OpenAlex ID: W3193876734

FWCI: 0.109

Cites: 7

Cited by: 1

Related to: 10