Thickness measurement method for self-supporting film with double chromatic confocal probes
Year: 2021
Type: article
Source: Applied Optics
DOI: 10.1364/ao.432384
Authors: Jiafu Li, Xiaoping Zhu, Hua Du, Zhengchao Ji, Kai Wang, Mo Zhao
Institutions: National Institute of Metrology, China Jiliang University
Language: English
Subfield: Computer Vision and Pattern Recognition
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
Award: G4362194837
OpenAlex ID: W3203269694