Work

Thin Films. PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing.

Year: 1999

Type: article

Authors: R. A. Powell, S. M. Rossnagel

Language: English

Topic: Advanced Materials and Semiconductor Technologies

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3204294878

FWCI: 1.1

Cites:

Cited by: 18

Related to: 10