Work

An Introduction to Lithography Machine

Year: 2021

Type: conference-paper

Abstract: With the rapid advance of industrial intelligent manufacturing and electronic information technology, the importance of integrated circuits keeps increasing.As a fundamental equipment of integrated circuits manufacturing, the lithography machine has become a key research target for researchers around the world.This paper provides a short overview of the lithography technology and lithography machines.Key elements of lithography machines, such as the operation mode, the light source and photoresist, have been focused in this paper.The future development prospect of lithography technology is also summarized.

Source: Advances in Social Science, Education and Humanities Research/Advances in social science, education and humanities research

DOI: 10.2991/assehr.k.211011.010

Author: Xihao Zhang

Institutions: Xi'an University of Science and Technology, Shaanxi University of Science and Technology

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: diamond

OpenAlex ID: W3207777995