High-speed analysis of spectroscopic ellipsometry data using deep learning methods
Year: 2021
Type: conference-paper
Source: OSA Advanced Photonics Congress
Authors: Yifei Li, Yifeng Wu, Heshan Yu, Ichiro Takeuchi, Rafael Jaramillo
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3209595272
