Work

Excimer Laser Micromachining of Silicon and On-Line Machining Depth Discovery Using Laser Interferometry

Year: 2000

Type: conference-paper

Source: Manufacturing engineering

DOI: 10.1115/imece2000-1795

Authors: Senthil Theppakuttai, Shaochen Chen

Institution: Iowa State University

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3211883155

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