Work

Laser Micromachining of MEMS Packaging Materials

Year: 2001

Type: conference-paper

DOI: 10.1115/imece2001/mems-23904

Authors: Vijay V. Kancharla, Kira K. Hendricks, Shaochen Chen

Institution: Iowa State University

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3212414038

FWCI:

Cites:

Cited by: 1

Related to: 10