Work

Partially Etched Holes for Residual Stress Release in Diaphragm-Based Pressure Sensors

Year: 2000

Type: conference-paper

DOI: 10.1115/imece2000-1096

Authors: Meng-Nian Niu, Fred J. von Preissig, Eun Sok Kim

Institutions: University of Hawaiʻi at Mānoa, University of Southern California

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3212901016

FWCI: 1.918

Cites:

Cited by: 2

Related to: 10