Work

Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design

Year: 2001

Type: conference-paper

Source: ASME International Mechanical Engineering Congress and Exposition (IMECE)

DOI: 10.1115/imece2001/mems-23874

Authors: Mohammad I. Kilani, Paul C. Galambos, Yousef S. Haik, Ching-Jen Chen

Institutions: Florida State University, Sandia National Laboratories California, Sandia National Laboratories, Florida Agricultural and Mechanical University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3213466975

FWCI: 0.845

Cites:

Cited by: 3

Related to: 10