Work

Residual Stress Effect on Performance of Diaphragm-Based MEMS Pressure Transducers

Year: 2000

Type: conference-paper

DOI: 10.1115/imece2000-1102

Authors: Meng-Nian Niu, Eun Sok Kim

Institutions: University of Hawaiʻi at Mānoa, University of Southern California

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3213882500

FWCI: 1.918

Cites:

Cited by: 2

Related to: 10