Work

Modeling and Optimization of a High Sensitivity Out-of-Plane Microgyroscope

Year: 2001

Type: conference-paper

DOI: 10.1115/imece2001/mems-23843

Authors: Shifeng Li, Shaochen Chen

Institution: Iowa State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3214599113

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