Work

Investigation of High Speed Silicon Wet Bulk Micromachining in KOH-based Solution

Year: 2019

Type: dissertation

Source: Research Archive of Indian Institute of Technology Hyderabad (Indian Institute of Technology Hyderabad)

Authors: V. N. Avvaru, Prem Pal

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3215636742

Cites:

Cited by: 1

Related to: 10