Work

Nanotechnological Manufacturing: Nanostructured Polymers Designed for Plasma/Energetic Beam Templating of Materials

Year: 2006

Type: article

Authors: G. S. Oehrlein, R. J. Phaneuf, David B. Graves, C. Grant Willson, Azar Alizadeh

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W336396675

FWCI:

Cites: 1

Cited by:

Related to: 10