Work

Practical Plasma Immersion Ion Implantation for Stress Regulation Treatment of Insulators and Complex Shapes

Year: 2003

Type: article

Source: Defense Technical Information Center (DTIC)

Authors: Bilek, M. M. M., Tarrant, R. N., Oates, T. W. H., Kwok, D. T., McKenzie, D. R.

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W338890438

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